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RF MEMS and Their Applications

RF MEMS and Their Applications by Vijay K. Varadan
English | 25 Oct. 2002 | ISBN: 047084308X | 406 Pages | PDF | 5 MB
Microelectromechanical systems (MEMS) refer to a collection of micro–sensors and actuators, which can react to environmental change under micro– circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs.

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RF MEMS and Their Applications

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